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Comparison of the electrical properties for etched and as-deposited BLT thin films.

Authors :
Kyu-Tae Lim
Kyoung-Tae Kim
Dong-Pyo Kim
Chang-Il Kim
Source :
30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts; 2003, p403-403, 1p
Publication Year :
2003

Details

Language :
English
ISBNs :
9780780379114
Database :
Complementary Index
Journal :
30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts
Publication Type :
Conference
Accession number :
81291826
Full Text :
https://doi.org/10.1109/PLASMA.2003.1229948