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Study on magnetized inductively coupled plasma with Nagoya III antenna.

Authors :
Jung-Hyun Cho
Jin-A Park
Yong-Seok Hwang
Gon-Ho Kim
Source :
30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts; 2003, p205-205, 1p
Publication Year :
2003

Details

Language :
English
ISBNs :
9780780379114
Database :
Complementary Index
Journal :
30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts
Publication Type :
Conference
Accession number :
81291460
Full Text :
https://doi.org/10.1109/PLASMA.2003.1228686