An approach of lateral RF MEMS switch for high performance.

Authors :: Tang, M.
Agarwal, A.
Li, J.
Zhang, Q.X.
Win, P.
Huang, J.M.
Liu, A.Q.
Source :: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2003; 2003, p99-102, 4p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780370661
Database :: Complementary Index
Journal :: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2003
Publication Type :: Conference
Accession number :: 81282584
Full Text :: https://doi.org/10.1109/DTIP.2003.1287016