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Quantitative control of plasma-surface interactions for highly reliable interconnects.

Authors :
Yatsuda, K.
Tatsumi, T.
Kawahara, K.
Enomoto, Y.
Hasegawa, T.
Hanada, K.
Saito, T.
Morita, Y.
Shinohara, K.
Yamane, T.
Source :
Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729); 2004, p90-92, 3p
Publication Year :
2004

Details

Language :
English
ISBNs :
9780780383081
Database :
Complementary Index
Journal :
Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729)
Publication Type :
Conference
Accession number :
81248410
Full Text :
https://doi.org/10.1109/IITC.2004.1345698