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Gate-last MISFET structures and process for high-k and metal gate MISFETs characterization.
- Source :
- Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516); 2004, p105-110, 6p
- Publication Year :
- 2004
Details
- Language :
- English
- ISBNs :
- 9780780382626
- Database :
- Complementary Index
- Journal :
- Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516)
- Publication Type :
- Conference
- Accession number :
- 81232343
- Full Text :
- https://doi.org/10.1109/ICMTS.2004.1309310