Overview of Cu/low K technology failure analysis and reliability issues.

Authors :: Huixian Wu
Cargo, J.
Seier, A.
Source :: Proceedings of the 10th International Symposium on the Physical & Failure Analysis of Integrated Circuits (IPFA 2003); 2003, p5-11, 7p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780377226
Database :: Complementary Index
Journal :: Proceedings of the 10th International Symposium on the Physical & Failure Analysis of Integrated Circuits (IPFA 2003)
Publication Type :: Conference
Accession number :: 81227698
Full Text :: https://doi.org/10.1109/IPFA.2003.1222711