An efficient treatment technique for TMAH wastewater by catalytic oxidation.

Authors :: Hirano, K.
Okamura, J.
Taira, T.
Sano, K.
Toyoda, A.
Ikeda, M.
Source :: Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130); 2000, p139-142, 4p
Publication Year :: 2000

Language :: English
ISBNs :: 9780780373921
Database :: Complementary Index
Journal :: Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
Publication Type :: Conference
Accession number :: 81226872
Full Text :: https://doi.org/10.1109/ISSM.2000.993634