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Silicidation induced strain phenomena in totally silicided (TOSI) gate transistors.

Authors :
Mondot, A.
Muller, M.
Aime, D.
Froment, B.
Cacho, F.
Talbot, A.
Leverd, F.
Rivoire, M.
Morand, Y.
Descombes, S.
Besson, P.
Toffoli, A.
Pokrant, S.
Skotnicki, T.
Source :
Proceedings of 35th European Solid-State Device Research Conference, 2005 (ESSDERC 2005); 2005, p427-430, 4p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780392038
Database :
Complementary Index
Journal :
Proceedings of 35th European Solid-State Device Research Conference, 2005 (ESSDERC 2005)
Publication Type :
Conference
Accession number :
81225869
Full Text :
https://doi.org/10.1109/ESSDER.2005.1546676