Fabrication of a three-axis accelerometer integrated with commercial 0.8 μm-CMOS circuits.

Details

Language :

English

ISBNs :

9780780352735

Database :

Complementary Index

Journal :

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

Publication Type :

Conference

Accession number :

81220194

Full Text :

https://doi.org/10.1109/MEMSYS.2000.838617