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Fabrication of a three-axis accelerometer integrated with commercial 0.8 μm-CMOS circuits.

Authors :
Takao, H.
Fukumoto, H.
Ishida, M.
Source :
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308); 2000, p781-786, 6p
Publication Year :
2000

Details

Language :
English
ISBNs :
9780780352735
Database :
Complementary Index
Journal :
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
Publication Type :
Conference
Accession number :
81220194
Full Text :
https://doi.org/10.1109/MEMSYS.2000.838617