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Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers.
- Source :
- LEOS 2006 - 19th Annual Meeting of the IEEE Lasers & Electro-Optics Society; 2006, p895-896, 2p
- Publication Year :
- 2006
Details
- Language :
- English
- ISBNs :
- 9780780395558
- Database :
- Complementary Index
- Journal :
- LEOS 2006 - 19th Annual Meeting of the IEEE Lasers & Electro-Optics Society
- Publication Type :
- Conference
- Accession number :
- 81188797
- Full Text :
- https://doi.org/10.1109/LEOS.2006.279114