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Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers.

Details

Language :
English
ISBNs :
9780780395558
Database :
Complementary Index
Journal :
LEOS 2006 - 19th Annual Meeting of the IEEE Lasers & Electro-Optics Society
Publication Type :
Conference
Accession number :
81188797
Full Text :
https://doi.org/10.1109/LEOS.2006.279114