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A multivariate statistical analysis of tool parameters to improve an erase failure of a flash memory device.

Authors :
Miwa, K.
Watanabe, K.
Takeishi, K.
Kobayashi, T.
Imaoka, K.
Source :
ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005; 2005, p132-135, 4p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780391437
Database :
Complementary Index
Journal :
ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005
Publication Type :
Conference
Accession number :
81186527
Full Text :
https://doi.org/10.1109/ISSM.2005.1513316