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Fabrication and optical property of two-dimensional infrared photonic crystals by deep reactive ion etching in Si.
- Source :
- Infrared & Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 & 12th International Conference on Terahertz Electronics, 2004; 2004, p183-184, 2p
- Publication Year :
- 2004
Details
- Language :
- English
- ISBNs :
- 9780780384903
- Database :
- Complementary Index
- Journal :
- Infrared & Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 & 12th International Conference on Terahertz Electronics, 2004
- Publication Type :
- Conference
- Accession number :
- 81174010
- Full Text :
- https://doi.org/10.1109/ICIMW.2004.1422015