Adaptive sampling methodology for in-line defect inspection.

Authors :: Bousetta, A.
Cross, A.J.
Source :: IEEE/SEMI Conference & Workshop on Advanced Semiconductor Manufacturing 2005; 2005, p25-31, 7p
Publication Year :: 2005

Language :: English
ISBNs :: 9780780389977
Database :: Complementary Index
Journal :: IEEE/SEMI Conference & Workshop on Advanced Semiconductor Manufacturing 2005
Publication Type :: Conference
Accession number :: 81172022
Full Text :: https://doi.org/10.1109/ASMC.2005.1438762