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Low temperature growth of carbon nanotube by thermal CVD with FeZrN catalyst.

Authors :
Shiroishi, T.
Sawada, T.
Hosono, A.
Nakata, S.
Kanazawa, Y.
Takai, M.
Source :
IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479); 2003, p13-14, 2p
Publication Year :
2003

Details

Language :
English
ISBNs :
9784818195158
Database :
Complementary Index
Journal :
IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479)
Publication Type :
Conference
Accession number :
81171380
Full Text :
https://doi.org/10.1109/IVMC.2003.1222959