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Fabrication of ultrafloppy single-crystal silicon cantilever for magnetic resonance imaging.

Authors :
Park, J.-S.
Lee, D.-W.
Gysin, U.
Rast, S.
Meyer, E.
Despont, M.
Gerber, Ch.
Source :
IEEE Sensors, 2005; 2005, p4-4, 1p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780390560
Database :
Complementary Index
Journal :
IEEE Sensors, 2005
Publication Type :
Conference
Accession number :
81167141
Full Text :
https://doi.org/10.1109/ICSENS.2005.1597688