Back to Search Start Over

Fabrication and characterization of AFM probe with crystal-quartz tuning fork structure.

Authors :
Hida, H.
Shikida, M.
Fukuzawa, K.
Ono, A.
Sato, K.
Asaumi, K.
Iriye, Y.
Di Cheng
Source :
IEEE International Symposium on Micro-NanoMechatronics & Human Science, 2005; 2005, p97-101, 5p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780394827
Database :
Complementary Index
Journal :
IEEE International Symposium on Micro-NanoMechatronics & Human Science, 2005
Publication Type :
Conference
Accession number :
81163914
Full Text :
https://doi.org/10.1109/MHS.2005.1589970