The key technologies in silicon based microwave and RF MEMS device fabrication.

Authors :: Zewen Liu
Xiaofeng Lei
Yun Xuan
Jia Wei
Zhongmin Chen
Litian Liu
Zhijian Li
Source :: ICMMT 4th International Conference on, Proceedings Microwave & Millimeter Wave Technology, 2004; 2004, pP/1-P/6-P/6, 1p
Publication Year :: 2004

Language :: English
ISBNs :: 9780780384019
Database :: Complementary Index
Journal :: ICMMT 4th International Conference on, Proceedings Microwave & Millimeter Wave Technology, 2004
Publication Type :: Conference
Accession number :: 81144218
Full Text :: https://doi.org/10.1109/ICMMT.2004.1411436