Thin L-shaped spacers for CMOS devices.

Authors :: Augendre, E.
Rooyackers, R.
de Potter de ten Broeck, M.
Kunnen, E.
Beckx, S.
Mannaert, G.
Vrancken, C.
Vassilev, V.
Chiarella, T.
Jurczak, M.
Debusschere, I.
Source :: ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003; 2003, p219-222, 4p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780379992
Database :: Complementary Index
Journal :: ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003
Publication Type :: Conference
Accession number :: 81132946
Full Text :: https://doi.org/10.1109/ESSDERC.2003.1256853