A study of the mechanisms for ESD damage to reticles.

Authors :: Montoya, J.
Levit, L.
Englisch, A.
Source :: Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000 (IEEE Cat. No.00TH8476); 2000, p394-405, 12p
Publication Year :: 2000

Language :: English
ISBNs :: 9781585370184
Database :: Complementary Index
Journal :: Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000 (IEEE Cat. No.00TH8476)
Publication Type :: Conference
Accession number :: 81131305
Full Text :: https://doi.org/10.1109/EOSESD.2000.890108