Laser micromachining of silicon in sulfur hexafluoride atmosphere: experiment and numerical simulation.

MLA

Yashkir, Y. M., et al. “Laser Micromachining of Silicon in Sulfur Hexafluoride Atmosphere: Experiment and Numerical Simulation.” CLEO/Europe. 2005 Conference on Lasers & Electro-Optics Europe, 2005, Jan. 2005, p. 665. EBSCOhost, https://doi.org/10.1109/CLEOE.2005.1568441.

APA

Yashkir, Y. M., Lee, S., Harb, M., & Yashkir, Y. Y. (2005). Laser micromachining of silicon in sulfur hexafluoride atmosphere: experiment and numerical simulation. CLEO/Europe. 2005 Conference on Lasers & Electro-Optics Europe, 2005, 665. https://doi.org/10.1109/CLEOE.2005.1568441

Chicago

Yashkir, Y.M., S. Lee, M. Harb, and Y.Yu. Yashkir. 2005. “Laser Micromachining of Silicon in Sulfur Hexafluoride Atmosphere: Experiment and Numerical Simulation.” CLEO/Europe. 2005 Conference on Lasers & Electro-Optics Europe, 2005, January, 665. doi:10.1109/CLEOE.2005.1568441.