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Laser micromachining of silicon in sulfur hexafluoride atmosphere: experiment and numerical simulation.
- Source :
- CLEO/Europe. 2005 Conference on Lasers & Electro-Optics Europe, 2005; 2005, p665-665, 1p
- Publication Year :
- 2005
Details
- Language :
- English
- ISBNs :
- 9780780389748
- Database :
- Complementary Index
- Journal :
- CLEO/Europe. 2005 Conference on Lasers & Electro-Optics Europe, 2005
- Publication Type :
- Conference
- Accession number :
- 81116257
- Full Text :
- https://doi.org/10.1109/CLEOE.2005.1568441