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The selection and creation of the rules in rules-based optical proximity correction.
- Source :
- 2001 4th International Conference on ASIC Proceedings ASICON 2001 (Cat. No.01TH8549); 2001, p50-53, 4p
- Publication Year :
- 2001
Details
- Language :
- English
- ISBNs :
- 9780780366770
- Database :
- Complementary Index
- Journal :
- 2001 4th International Conference on ASIC Proceedings ASICON 2001 (Cat. No.01TH8549)
- Publication Type :
- Conference
- Accession number :
- 81113793
- Full Text :
- https://doi.org/10.1109/ICASIC.2001.982496