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A clover shaped silicon piezoresistive microphone for miniaturiz Photoacoustic Gas sensors.

Authors :
Grinde, C.
Ohlckers, P.
Mielnik, M.
Jensen, G.U.
Ferber, A.
Wang, D.T.
Source :
2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS; 2009, p256-260, 5p
Publication Year :
2009

Details

Language :
English
ISBNs :
9781424438747
Database :
Complementary Index
Journal :
2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
Publication Type :
Conference
Accession number :
81088652

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