High Speed (GHz), Ultra-High Pressure (GPA) Sensor Array Fabricated in Integrated CMOS+MEMS Process.

Details

Language :

English

ISBNs :

9781424429776

Database :

Complementary Index

Journal :

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

Publication Type :

Conference

Accession number :

81074835

Full Text :

https://doi.org/10.1109/MEMSYS.2009.4805515