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Line edge roughness and spacing effect on low-k TDDB characteristics.

Authors :
Chen, F.
Lloyd, J.R.
Chanda, K.
Achanta, R.
Bravo, O.
Strong, A.
McLaughlin, P.S.
Shinosky, M.
Sankaran, S.
Gebreselasie, E.
Stamper, A.K.
He, Z.X.
Source :
2008 IEEE International Reliability Physics Symposium; 2008, p132-137, 6p
Publication Year :
2008

Details

Language :
English
ISBNs :
9781424420490
Database :
Complementary Index
Journal :
2008 IEEE International Reliability Physics Symposium
Publication Type :
Conference
Accession number :
81020770
Full Text :
https://doi.org/10.1109/RELPHY.2008.4558874
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