Impact of Oxygen Vacancies Profile and Fringe Effect on Leakage Current Instability of Tantalum Pentoxide Metal-Insulator-Metal (MIM) Capacitors.

Details

Language :

English

ISBNs :

9781424421947

Database :

Complementary Index

Journal :

2008 IEEE International Integrated Reliability Workshop Final Report

Publication Type :

Conference

Accession number :

81019660

Full Text :

https://doi.org/10.1109/irws.2008.4796124