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Effective reduction of threshold voltage variability and standby leakage using advanced co-implantation and laser anneal for low power applications.

Authors :
Ho Lee
Hwa Sung Rhee
Ji Hye Yi
Myung Sun Kim
Hoi Sung Chung
Min Sun Kim
Sun Me Lim
Yong Shik Kim
Moon Han Park
Nae-In Lee
Jong Shik Yoon
Source :
2008 IEEE International Electron Devices Meeting; 2008, p1-4, 4p
Publication Year :
2008

Details

Language :
English
ISBNs :
9781424423774
Database :
Complementary Index
Journal :
2008 IEEE International Electron Devices Meeting
Publication Type :
Conference
Accession number :
81019306
Full Text :
https://doi.org/10.1109/IEDM.2008.4796849