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Characterization of MOSFETs intrinsic performance using in-wafer advanced Kelvin-contact device structure for high performance CMOS LSIs.
- Source :
- 2008 IEEE International Conference on Microelectronic Test Structures; 2008, p155-159, 5p
- Publication Year :
- 2008
Details
- Language :
- English
- ISBNs :
- 9781424418008
- Database :
- Complementary Index
- Journal :
- 2008 IEEE International Conference on Microelectronic Test Structures
- Publication Type :
- Conference
- Accession number :
- 81015842
- Full Text :
- https://doi.org/10.1109/ICMTS.2008.4509331