Precision ion implantation: A critical tool for advanced device processing.

Authors :: Gossmann, H.-J.L.
Thanigaivelan, T.
Hatem, C.
Source :: 2008 9th International Conference on Solid-State & Integrated-Circuit Technology; 2008, p1296-1299, 4p
Publication Year :: 2008

Language :: English
ISBNs :: 9781424421855
Database :: Complementary Index
Journal :: 2008 9th International Conference on Solid-State & Integrated-Circuit Technology
Publication Type :: Conference
Accession number :: 80988741
Full Text :: https://doi.org/10.1109/ICSICT.2008.4734792