Multi-Scale Modeling of Shock-Induced Failure of Polysilicon MEMS.

Authors :: Ghisi, A.
Fachin, F.
Mariani, S.
Corigliano, A.
Zerbini, S.
Source :: 2007 International Conference on Thermal, Mechanical & Multi-Physics Simulation Experiments in Microelectronics & Micro-Systems. EuroSime 2007; 2007, p1-6, 6p
Publication Year :: 2007

Language :: English
ISBNs :: 9781424411061
Database :: Complementary Index
Journal :: 2007 International Conference on Thermal, Mechanical & Multi-Physics Simulation Experiments in Microelectronics & Micro-Systems. EuroSime 2007
Publication Type :: Conference
Accession number :: 80938482
Full Text :: https://doi.org/10.1109/ESIME.2007.360014