Study of Plasma Damage at Recess-Channel Gate (RG) Structure During Plasma Nitridation.

Details

Language :

English

ISBNs :

9781424409198

Database :

Complementary Index

Journal :

2007 IEEE International Reliability Physics Symposium Proceedings 45th Annual

Publication Type :

Conference

Accession number :

80911763

Full Text :

https://doi.org/10.1109/RELPHY.2007.369917