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Electrical Properties of Carbon Nanotube Via Interconnects Fabricated by Novel Damascene Process.
- Source :
- 2007 IEEE International Interconnect Technology Conference; 2007, p204-206, 3p
- Publication Year :
- 2007
Details
- Language :
- English
- ISBNs :
- 9781424410699
- Database :
- Complementary Index
- Journal :
- 2007 IEEE International Interconnect Technology Conference
- Publication Type :
- Conference
- Accession number :
- 80910989
- Full Text :
- https://doi.org/10.1109/IITC.2007.382390