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Electrical Properties of Carbon Nanotube Via Interconnects Fabricated by Novel Damascene Process.

Authors :
Nihei, M.
Hyakushima, T.
Sato, S.
Nozue, T.
Norimatsu, M.
Mishima, M.
Murakami, T.
Kondo, D.
Kawabata, A.
Ohfuti, M.
Awano, Y.
Source :
2007 IEEE International Interconnect Technology Conference; 2007, p204-206, 3p
Publication Year :
2007

Details

Language :
English
ISBNs :
9781424410699
Database :
Complementary Index
Journal :
2007 IEEE International Interconnect Technology Conference
Publication Type :
Conference
Accession number :
80910989
Full Text :
https://doi.org/10.1109/IITC.2007.382390