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Maneuvering Pull-in Voltage of an Electrostatic Micro-switch by Introducing a Pre-charged Electrode.

Authors :
Hyun-Ho Yang
Jeong Oen Lee
Jun-Bo Yoon
Source :
2007 IEEE International Electron Devices Meeting; 2007, p439-442, 4p
Publication Year :
2007

Details

Language :
English
ISBNs :
9781424415083
Database :
Complementary Index
Journal :
2007 IEEE International Electron Devices Meeting
Publication Type :
Conference
Accession number :
80908650
Full Text :
https://doi.org/10.1109/IEDM.2007.4418967