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Reliability of Enhancement-mode AlGaN/GaN HEMTs Fabricated by Fluorine Plasma Treatment.

Authors :
Congwen Yi
Ruonan Wang
Wei Huang
Tang, W.C.-W.
Lau, K.M.
Chen, K.J.
Source :
2007 IEEE International Electron Devices Meeting; 2007, p389-392, 4p
Publication Year :
2007

Details

Language :
English
ISBNs :
9781424415083
Database :
Complementary Index
Journal :
2007 IEEE International Electron Devices Meeting
Publication Type :
Conference
Accession number :
80908637
Full Text :
https://doi.org/10.1109/IEDM.2007.4418954