Magnetic Field Analysis of Circular Plane Magnetron Sputtering Source.

Authors :: Ma Jianping
Zhang Xifeng
Liu Yantao
Source :: 2007 8th International Conference on Electronic Measurement & Instruments; 2007, p1-259, 516p
Publication Year :: 2007

Language :: English
ISBNs :: 9781424411368
Database :: Complementary Index
Journal :: 2007 8th International Conference on Electronic Measurement & Instruments
Publication Type :: Conference
Accession number :: 80876795
Full Text :: https://doi.org/10.1109/ICEMI.2007.4350436