Reliability Assessment on Highly Manufacturable MOSFETs with Metal Gate and Hf based Gate Dielectrics.

Details

Language :

English

ISBNs :

9781424410156

Database :

Complementary Index

Journal :

2007 14th International Symposium on the Physical & Failure Analysis of Integrated Circuits

Publication Type :

Conference

Accession number :

80861155

Full Text :

https://doi.org/10.1109/IPFA.2007.4378051