Characterization of Thin Oxide using FIB-SIMS and FIB-TEM Techniques.

Details

Language :

English

ISBNs :

9780780393578

Database :

Complementary Index

Journal :

2006 IEEE Conference on Emerging Technologies - Nanoelectronics

Publication Type :

Conference

Accession number :

80827902

Full Text :

https://doi.org/10.1109/NANOEL.2006.1609713