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Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept.

Authors :
Baylor, L.R.
Gardner, W.L.
Yang, X.
Kasica, R.J.
Blalock, B.
Durisety, C.
Fowlkes, J.
Hensley, D.K.
Islam, S.
Joy, D.C.
Melechko, A.V.
Rack, P.D.
Randolph, S.J.
Rucker, R.
Thomas, D.K.
Simpson, M.L.
Source :
2005 International Vacuum Nanoelectronics Conference; 2005, p74-75, 2p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780393844
Database :
Complementary Index
Journal :
2005 International Vacuum Nanoelectronics Conference
Publication Type :
Conference
Accession number :
80800201
Full Text :
https://doi.org/10.1109/IVNC.2005.1619491
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