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CMOS monolithic atomic force microscope.

Authors :
Barrettino, D.
Hafizovic, S.
Volden, T.
Sedivy, J.
Kirstein, K.
Hierlemann, A.
Baltes, H.
Source :
2004 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.04CH37525); 2004, p306-309, 4p
Publication Year :
2004

Details

Language :
English
ISBNs :
9780780382879
Database :
Complementary Index
Journal :
2004 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.04CH37525)
Publication Type :
Conference
Accession number :
80782655
Full Text :
https://doi.org/10.1109/VLSIC.2004.1346597