Reliability issues and advanced failure analysis deprocessing techniques for copper/low-k technology.

Details

Language :

English

ISBNs :

9780780376496

Database :

Complementary Index

Journal :

2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual

Publication Type :

Conference

Accession number :

80774487

Full Text :

https://doi.org/10.1109/RELPHY.2003.1197805