MEMS-based gray-scale lithography.

Authors :: Waits, C.M.
Ghodssi, R.
Ervin, M.H.
Dubey, M.
Source :: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497); 2001, p182-185, 4p
Publication Year :: 2001

Language :: English
ISBNs :: 9780780374324
Database :: Complementary Index
Journal :: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
Publication Type :: Conference
Accession number :: 80769618
Full Text :: https://doi.org/10.1109/ISDRS.2001.984470