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Dependence of plasma process induced damage on the transistor gate area.
- Source :
- 2001 6th International Symposium on Plasma- & Process-Induced Damage (IEEE Cat. No.01TH8538); 2001, p124-127, 4p
- Publication Year :
- 2001
Details
- Language :
- English
- ISBNs :
- 9780965157759
- Database :
- Complementary Index
- Journal :
- 2001 6th International Symposium on Plasma- & Process-Induced Damage (IEEE Cat. No.01TH8538)
- Publication Type :
- Conference
- Accession number :
- 80768052
- Full Text :
- https://doi.org/10.1109/PPID.2001.929994