A model for evaluating cumulative oxide damage from multiple plasma processes.

Authors :: Noguchi, K.
Matsumoto, A.
Oda, N.
Source :: 2000 IEEE International Reliability Physics Symposium Proceedings 38th Annual (Cat. No.00CH37059); 2000, p364-369, 6p
Publication Year :: 2000

Language :: English
ISBNs :: 9780780358607
Database :: Complementary Index
Journal :: 2000 IEEE International Reliability Physics Symposium Proceedings 38th Annual (Cat. No.00CH37059)
Publication Type :: Conference
Accession number :: 80765325
Full Text :: https://doi.org/10.1109/RELPHY.2000.843941