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Normally-Closed Electrostatic Micro Valve with Pressure Balance Mechanism for Portable Fuel Cell Application.
- Source :
- 19th IEEE International Conference on Micro Electro Mechanical Systems; 2006, p722-725, 4p
- Publication Year :
- 2006
Details
- Language :
- English
- ISBNs :
- 9780780394759
- Database :
- Complementary Index
- Journal :
- 19th IEEE International Conference on Micro Electro Mechanical Systems
- Publication Type :
- Conference
- Accession number :
- 80762515
- Full Text :
- https://doi.org/10.1109/MEMSYS.2006.1627901