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Normally-Closed Electrostatic Micro Valve with Pressure Balance Mechanism for Portable Fuel Cell Application.

Authors :
K. Yoshida
Y. Hagihara
S. Tanaka
M. Esashi
Source :
19th IEEE International Conference on Micro Electro Mechanical Systems; 2006, p722-725, 4p
Publication Year :
2006

Details

Language :
English
ISBNs :
9780780394759
Database :
Complementary Index
Journal :
19th IEEE International Conference on Micro Electro Mechanical Systems
Publication Type :
Conference
Accession number :
80762515
Full Text :
https://doi.org/10.1109/MEMSYS.2006.1627901