Single chip atomic force microscope.

Authors :: Hafizovic, S.
Volden, T.
Kirstein, K.-U.
Hiedemann, A.
Barrettino, D.
Source :: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005; 2005, p638-641, 4p
Publication Year :: 2005

Language :: English
ISBNs :: 9780780387324
Database :: Complementary Index
Journal :: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005
Publication Type :: Conference
Accession number :: 80761559
Full Text :: https://doi.org/10.1109/MEMSYS.2005.1454010