Improvement in proton beam writing at the nano scale.

Authors :: van Kan, J.A.
Bettiol, A.A.
Ansari, K.
Shao, P.
Watt, F.
Source :: 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest; 2004, p673-676, 4p
Publication Year :: 2004

Language :: English
ISBNs :: 9780780382657
Database :: Complementary Index
Journal :: 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
Publication Type :: Conference
Accession number :: 80760365
Full Text :: https://doi.org/10.1109/MEMS.2004.1290674