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A statistical method for reducing systematic defects in the initial stages of production.
- Source :
- 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science & Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259); 2002, p77-81, 5p
- Publication Year :
- 2002
Details
- Language :
- English
- ISBNs :
- 9780780371583
- Database :
- Complementary Index
- Journal :
- 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science & Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
- Publication Type :
- Conference
- Accession number :
- 80755255
- Full Text :
- https://doi.org/10.1109/ASMC.2002.1001578