Wafer-level fabrication of nanoscale patterned sapphire substrates with broadband optical transmittance.

Details

Language :

English

ISBNs :

9781457701573

Database :

Complementary Index

Journal :

2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS)

Publication Type :

Conference

Accession number :

80398909

Full Text :

https://doi.org/10.1109/TRANSDUCERS.2011.5969788