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Three dimensional photoacoustic imaging using a monolithic CMOS MEMS capacitive ultrasonic sensor.

Authors :
Meng-Lin Li
Po-Hsun Wang
Pei-Liang Liao
Lu, M.S.-C.
Source :
2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p92-95, 4p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781457701573
Database :
Complementary Index
Journal :
2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS)
Publication Type :
Conference
Accession number :
80398299
Full Text :
https://doi.org/10.1109/TRANSDUCERS.2011.5969144