FEM based modeling and optimization of a 2D micro mirror.

Authors :: Schock, W.
Mehner, J.
Fritz, J.
Muchow, J.
Friese, C.
Pinter, S.
Source :: 2011 12th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems (EuroSimE); 2011, p1/6-6/6-6/6, 1p
Publication Year :: 2011

Language :: English
ISBNs :: 9781457701078
Database :: Complementary Index
Journal :: 2011 12th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems (EuroSimE)
Publication Type :: Conference
Accession number :: 80363471
Full Text :: https://doi.org/10.1109/ESIME.2011.5765782